Customized Static-Dissipative DLC Coating

Name: Customized Static-Dissipative DLC Coating
Rating: 5 (100 reviews)

In response to the electrostatic damage risks caused by linewidth scaling below 20 nm in advanced semiconductor processes, Hans-tech, Trusval, and ITRI have formed a tripartite industry-academia collaboration. By integrating advanced PVD technology with an improved magnetic furnace arc ion system, we have jointly developed a surface-modified diamond-like carbon coating (ESD-DLC). This coating addresses the limitations of existing products, such as poor electrostatic dissipation, short lifespan, high costs, and dependence on external technologies.

Features

Stable electrical performance

The DLC coating has a surface resistivity between 10^5 and 10^10 ohms/sq, complying with the ANSI/ESD S541 standard for electrostatic dissipative materials.

Applicable Metal Substrates

Primarily used on various metal carriers and workpiece surfaces, providing long-lasting and stable electrostatic dissipation.

Improves Limitations of Conventional Products

Coating Specifications

Specification	Description	Features
Coating Color	Black, Dark Gray, Glossy / Matte	Surface Blackening
Technology	Cathodic Arc Deposition	Dense, 3D Coating, Low Contamination, Cost-effective
Structure	Multi-layer Design	Excellent Adhesion, With coating toughness
Thickness	3-10 µm	No Impact on Original Dimensions
Surface Resistivity	10^5-10^10 ohm	Stable quality, Customized service
Heat Resistance	Max. 250-300 ℃	Applicable to high-temperature environments
Coating Hardness	12-25 GPa

Differences in Coating Properties

FIELD1	ESD-DLC PVD
Thickness	3-10 µm
Density	Excellent
Adhesion	Excellent
Surface Resistivity	Tunable
Resistance Uniformity	Good
Coating Hardness (GPa)	12-20
Heat Resistance	> 250℃