Customised ESD-DLC (Electrostatic Dissipative Diamond-Like Carbon) Coating

Name: Customised ESD-DLC (Electrostatic Dissipative Diamond-Like Carbon) Coating
Brand: HANSTECH ADVANCED MATERIALS CO., LTD.
SKU: 1062

# Customized Static-Dissipative DLC Coating # Nano Materials

To address the risk of electrostatic damage arising from shrinking line widths (< 20 nm) in advanced semiconductor processes, Hantai, Sinher Technology and ITRI collaborated on industry-research development, combining advanced PVD technology with an improved magnetic-arc ion system to jointly develop a surface-modified diamond-like carbon coating (ESD-DLC) that overcomes the problems of existing products: inability to dissipate static electricity, short service life, high cost and dependence on external technology.

Features

Stable Electrical Performance

The surface resistance of the DLC coating ranges from 10^5 to 10^10 ohm/sq, complying with the ANSI/ESD S541 classification standard for static dissipative materials.

Applicable Metal Substrates

Mainly applied to the surfaces of metal carriers and workpieces, providing long-lasting, stable electrostatic dissipation.

Improvements over Conventional Products

Coating Specifications

Coating Specification Item	Details	Features
Coating colour	Grey-black / black	Surface blackening
Coating technology	Cathodic arc ion plating	Dense, 3D coating, low pollution
Structure	Multilayer structural design	Excellent adhesion
Thickness	3-10 µm	Minimal effect on dimensional tolerance
Surface resistance	10^5-10^9 ohm	Electrostatic dissipation
Temperature resistance	Max. 200 ℃	For use in high-temperature environments
Coating hardness	12-20 GPa

Comparison of Coating Properties

Coating properties	ESD-DLC PVD
Thickness	3-10 µm
Density	Excellent
Adhesion	Excellent
Surface resistance	Adjustable
Resistance uniformity	Good
Film hardness (GPa)	12-20
Temperature resistance	Max. 200 ℃